JPH0511991Y2 - - Google Patents

Info

Publication number
JPH0511991Y2
JPH0511991Y2 JP1987061120U JP6112087U JPH0511991Y2 JP H0511991 Y2 JPH0511991 Y2 JP H0511991Y2 JP 1987061120 U JP1987061120 U JP 1987061120U JP 6112087 U JP6112087 U JP 6112087U JP H0511991 Y2 JPH0511991 Y2 JP H0511991Y2
Authority
JP
Japan
Prior art keywords
chuck
vacuum
vacuum chuck
adsorbed
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987061120U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63169286U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987061120U priority Critical patent/JPH0511991Y2/ja
Publication of JPS63169286U publication Critical patent/JPS63169286U/ja
Application granted granted Critical
Publication of JPH0511991Y2 publication Critical patent/JPH0511991Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Automatic Assembly (AREA)
JP1987061120U 1987-04-22 1987-04-22 Expired - Lifetime JPH0511991Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987061120U JPH0511991Y2 (en]) 1987-04-22 1987-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987061120U JPH0511991Y2 (en]) 1987-04-22 1987-04-22

Publications (2)

Publication Number Publication Date
JPS63169286U JPS63169286U (en]) 1988-11-04
JPH0511991Y2 true JPH0511991Y2 (en]) 1993-03-25

Family

ID=30894162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987061120U Expired - Lifetime JPH0511991Y2 (en]) 1987-04-22 1987-04-22

Country Status (1)

Country Link
JP (1) JPH0511991Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6305272B2 (ja) * 2014-08-14 2018-04-04 株式会社ディスコ 搬送装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5338291Y2 (en]) * 1973-08-14 1978-09-16
JPS5718991U (en]) * 1980-07-02 1982-01-30

Also Published As

Publication number Publication date
JPS63169286U (en]) 1988-11-04

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